"I feel great. I came here for matches - I got five and I got the win, so it was a good week," Sharapova told reporters.
"I served and returned well, two things that are very important indoors."
Arvidsson, who won at Memphis in 2006, lost nine successive games from 2-2 in the first set.
In the men's draw, U.S. Davis Cup team mates Sam Querrey and John Isner set up an all-American showdown with contrasting semi-final victories.
Eighth seed Querrey held off Latvian Ernests Gulbis 6-3 6-4 after the sixth-seeded Isner beat German Philipp Petzschner 7-5 4-6 6-3.
The pair will face off Sunday before teaming up to represent the United States in a Davis Cup World Group tie against Serbia in Belgrade on March 5-7.
Querrey, who beat top seed and defending champion Andy Roddick in the quarter-finals, broke Gulbis in each set while saving all nine break point opportunities.
"I came up big on the break points," the world number 31 said. "I think I made a high percentage of first serves on most of them and I just kind of willed out that last game at 5-4."
World number 25 Isner converted three of 11 break points and smashed 13 aces to win his first meeting with Petzschner.
"I had some chances early in the second to pull away a little bit, didn't do it," Isner said.
"It went to a third set and I told myself not to get rattled, which I didn't.
I knew that I still had my serve in my pocket - I'm going to hold serve, take my chances on the return game, and I like my chances in the third set no matter who I'm playing.
"I usually play pretty well in the third."
(Reporting by Gene Cherry in Salvo, North Carolina; Editing by John O'Brien and Greg Stutchbury; To query or comment on this story email sportsfeedback@thomsonreuters.com)
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