Updated

Mason, OH (SportsNetwork.com) - Five-time champion Roger Federer defeated two- time winner Andy Murray 6-3, 7-5 in Friday's quarterfinals at the Western & Southern Open, a Masters 1000 event.

The second-seeded Federer fell behind 4-1 in the second set before winning four straight games. He advanced when the eighth-seeded Murray fired a forehand into the net on match point.

Federer converted five of his 13 break point chances and evened the head-to- head series with the Brit at 11 wins apiece.

The Swiss star will meet Canadian Milos Raonic in the semifinals. The fifth seed mauled 15th-seeded Italian Fabio Fognini 6-1, 6-0 in 57 minutes. Raonic captured the Citi Open title two weeks ago in Washington, D.C.

Earlier, Frenchman Julien Benneteau rallied to upend third-seeded Swiss Stan Wawrinka 1-6, 6-1, 6-2 in 80 minutes. Wawrinka, the Australian open champion, captured the first set in a mere 20 minutes before unraveling with a series of unforced errors, including 18 alone in the third set.

The 32-year-old Benneteau has beaten Wawrinka in their last three meetings and will battle sixth-seeded David Ferrer in his first-ever Masters semifinal.

Ferrer bested 16th-seeded Tommy Robredo 6-4, 3-6, 6-3, in an all-Spanish affair. Robredo stunned world No. 1 Novak Djokovic on Thursday.

The winner of this U.S. Open Series tournament will earn $638,850.